Multifunctional Al-doped ZnO thin films for vertically aligned liquid crystal devices

S Petrov, D Petrova, CNH Minh, V Marinova… - Optical Materials, 2023 - Elsevier
The integration of ITO-free transparent conductive layers remains a big challenge for
development of next generation technologies. Here, we demonstrate the feasibility of
transparent and conductive Aluminum-doped Zinc Oxide (AZO) thin films to operate
simultaneously as electrode and alignment layer in Liquid Crystal (LC) device configuration.
Controlling the growth process of AZO thin films by Atomic Layer Deposition (ALD)
technique results of predominantly (100) crystallographic oriented AZO with very high …

Multifunctional Al-Doped Zno Thin Films for Vertically Aligned Liquid Crystal Devices

V Marinova, S Petrov, D Petrova, NHM Chau… - Available at SSRN … - papers.ssrn.com
The integration of ITO-free transparent conductive layers remains a big challenge for
development of next generation technologies. Here, we demonstrate the feasibility of
transparent and conductive Aluminum-doped Zinc Oxide (AZO) thin films to operate
simultaneously as electrode and alignment layer in Liquid Crystal (LC) device configuration.
Controlling the growth process of AZO thin films by Atomic Layer Deposition (ALD)
technique results of predominantly (100) crystallographic oriented AZO with very high …
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