Nanocrystalline diamond for RF-MEMS applications

S Balachandran, T Weller, A Kumar… - Emerging …, 2015 - Elsevier
This article presents thermally actuated nanocrystalline diamond bridges for microwave and
high power RF applications. The growth process along with the seeding technique for
generating the diamond films has been discussed. RF applications which include
mechanical resonators and electrostatically actuated switches demonstrated by other
researchers is presented. The diamond bridges are integrated in CPW and microstrip
topologies to operate as a switch and tunable inductor. In addition to small signal …
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