Nanoindentation of silicon nitride: A multimillion-atom molecular dynamics study
P Walsh, A Omeltchenko, RK Kalia, A Nakano… - Applied physics …, 2003 - pubs.aip.org
Nanoindentation of crystalline and amorphous silicon nitride films is studied using 10-million-
atom molecular dynamics simulations. A rigid pyramid-shaped indenter tip is used. Load–
displacement curves are computed and are used to derive hardness and elastic moduli of
the simulated crystalline and amorphous films. Computer images of local pressure
distributions and configuration snapshots show that plastic deformation in the film extends to
regions far from the actual indent.
atom molecular dynamics simulations. A rigid pyramid-shaped indenter tip is used. Load–
displacement curves are computed and are used to derive hardness and elastic moduli of
the simulated crystalline and amorphous films. Computer images of local pressure
distributions and configuration snapshots show that plastic deformation in the film extends to
regions far from the actual indent.
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