Nanoscale investigation of optical and electrical properties by dynamic-mode atomic force microscopy using a piezoelectric cantilever

N Satoh, K Kobayashi, S Watanabe… - Japanese journal of …, 2003 - iopscience.iop.org
N Satoh, K Kobayashi, S Watanabe, T Fujii, T Horiuchi, H Yamada, K Matsushige
Japanese journal of applied physics, 2003iopscience.iop.org
We demonstrated a novel application of a microfabricated force-sensing cantilever with a
lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode
atomic force microscope (AFM) combined with a scanning near-field optical microscope
(SNOM). This experimental setup was also applied to a Kelvin-probe force microscope
(KFM) for the investigation of local electrical properties. A frequency modulation (FM)
detection method was used for enhancing the detection sensitivity of electrostatic forces …
Abstract
We demonstrated a novel application of a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode atomic force microscope (AFM) combined with a scanning near-field optical microscope (SNOM). This experimental setup was also applied to a Kelvin-probe force microscope (KFM) for the investigation of local electrical properties. A frequency modulation (FM) detection method was used for enhancing the detection sensitivity of electrostatic forces between a probe tip and a sample. Local optical properties of a PbTiO 3 single crystal were investigated using the conductive PZT cantilever as an AFM/SNOM probe. Furthermore, studies on local optical and electrical properties of ferroelectric copolymer films were also presented.
iopscience.iop.org
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