lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode
atomic force microscope (AFM) combined with a scanning near-field optical microscope
(SNOM). This experimental setup was also applied to a Kelvin-probe force microscope
(KFM) for the investigation of local electrical properties. A frequency modulation (FM)
detection method was used for enhancing the detection sensitivity of electrostatic forces …