Native Oxide Formation in NbTiN Thin Films for Traveling-Wave Superconducting Nanostripe Single-Photon Detectors
SA Nazib, TA Hutchins-Delgado, MV Reymatias… - Quantum 2.0, 2023 - opg.optica.org
Quantum 2.0, 2023•opg.optica.org
… Abstract: We report on a systematic study of native oxide formation in films of NbTiN
deposited using a physical vapor deposition process on silicon nitride/silicon dioxide
dielectrics, intended for fabrication of silicon quantum photonic integrated circuits. © 2023 The
Authors … In this paper, we report on our investigations of native oxide formation in NbTiN
thin films deposited using physical vapor deposition on Si samples covered with SiO2 and
Si3N4, intended for quantum photonic integrated circuits. Comprehensive characterization …
deposited using a physical vapor deposition process on silicon nitride/silicon dioxide
dielectrics, intended for fabrication of silicon quantum photonic integrated circuits. © 2023 The
Authors … In this paper, we report on our investigations of native oxide formation in NbTiN
thin films deposited using physical vapor deposition on Si samples covered with SiO2 and
Si3N4, intended for quantum photonic integrated circuits. Comprehensive characterization …
Abstract
We report on a systematic study of native oxide formation in films of NbTiN deposited using a physical vapor deposition process on silicon nitride/silicon dioxide dielectrics, intended for fabrication of silicon quantum photonic integrated circuits.
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