Native oxide and hydroxides and their implications for bulk AlN crystal growth
Oxygen degrades the properties of AlN, thus producing bulk single crystals with low oxygen
concentrations is an important goal. Most of the oxygen in bulk AlN single crystals grown by
the sublimation–recondensation method originates from the hydroxides and oxides that
spontaneously form on the surfaces of the AlN source powder. For a typical AlN powder with
an average particle size of 1–2μm, a 1–3nm thick oxide and/or hydroxide can account for
most of its oxygen (generally in the order of 1.0 wt%) and hydrogen (200–300ppm). Heating …
concentrations is an important goal. Most of the oxygen in bulk AlN single crystals grown by
the sublimation–recondensation method originates from the hydroxides and oxides that
spontaneously form on the surfaces of the AlN source powder. For a typical AlN powder with
an average particle size of 1–2μm, a 1–3nm thick oxide and/or hydroxide can account for
most of its oxygen (generally in the order of 1.0 wt%) and hydrogen (200–300ppm). Heating …
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