New fabrication method of InGaN laser diode by epitaxial lateral overgrowth and cleavable technique from free-standing non-and semi-polar GaN substrate

T Kamikawa, S Gandrothula, H Li… - … and Devices XVI, 2021 - spiedigitallibrary.org
T Kamikawa, S Gandrothula, H Li, VB Olivia, F Wu, D Cohen, JS Speck, SP Denbaars
Gallium Nitride Materials and Devices XVI, 2021spiedigitallibrary.org
We propose a new Fabry-Perot (FP) GaN laser fabrication method utilizing an epitaxial
lateral overgrowth (ELO) technique and m-plane cleavability of the GaN crystal. The
removed m-plane InGaN laser having a lasing wavelength 408. 1 nm operated at a low
threshold current density as low as 2.15 kA/cm 2. First, unlike a conventional ELO growth
technique, we avoid coalescence between adjacent ELO layers, thus forming island-like
ELO layer bars, which were later used as the base for FP GaN laser. Then, a laser device …
We propose a new Fabry-Perot (FP) GaN laser fabrication method utilizing an epitaxial lateral overgrowth (ELO) technique and m-plane cleavability of the GaN crystal. The removed m-plane InGaN laser having a lasing wavelength 408. 1 nm operated at a low threshold current density as low as 2.15 kA/cm2. First, unlike a conventional ELO growth technique, we avoid coalescence between adjacent ELO layers, thus forming island-like ELO layer bars, which were later used as the base for FP GaN laser. Then, a laser device epilayers were epitaxially grown and laser ridge structure was fabricated on each of these non-coalesced island-like ELO base layers. Island-like ELO laser bar formation facilitates an easy removal of the laser bars mechanically using a commercially available adhesive polymer film. Our investigation found that cleavable m-plane of the GaN crystal assists in the liftoff of the fabricated m-plane InGaN FP lasers. We further confirm that the reported fabrication method can be adopted to semi-polar crystal plane orientations of GaN.
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