Optical and electrical properties of Ti (Cr) O2: N thin films deposited by magnetron co-sputtering
K Kollbek, A Szkudlarek, MM Marzec… - Applied Surface …, 2016 - Elsevier
The paper deals with TiO 2-based thin films, doped with Cr and N, obtained by magnetron
co-sputtering from titanium dioxide ceramic and chromium targets in Ar+ N 2 atmosphere.
Co-doped samples of Ti (Cr) O 2: N are investigated from the point of view of morphological,
crystallographic, optical, and electrical properties. Characterization techniques such as: X-
ray diffraction, XRD, scanning electron microscopy, SEM, atomic force microscopy, AFM,
Energy Dispersive X-ray spectroscopy, EDX, X-ray photoelectron spectroscopy, XPS, optical …
co-sputtering from titanium dioxide ceramic and chromium targets in Ar+ N 2 atmosphere.
Co-doped samples of Ti (Cr) O 2: N are investigated from the point of view of morphological,
crystallographic, optical, and electrical properties. Characterization techniques such as: X-
ray diffraction, XRD, scanning electron microscopy, SEM, atomic force microscopy, AFM,
Energy Dispersive X-ray spectroscopy, EDX, X-ray photoelectron spectroscopy, XPS, optical …
[PDF][PDF] Optical and electrical properties of Ti (Cr) O2: N thin films deposited by magnetron co-sputtering
KKASM Marzec, LSMCA Bernasik - 2016 - academia.edu
The paper deals with TiO2-based thin films, doped with Cr and N, obtained by magnetron co-
sputtering from titanium dioxide ceramic and chromium targets in Ar+ N2 atmosphere. Co-
doped samples of Ti (Cr) O2: N are investigated from the point of view of morphological,
crystallographic, optical, and electrical properties. Characterization techniques such as: X-
ray diffraction, XRD, scanning electron microscopy, SEM, atomic force microscopy, AFM,
Energy Dispersive X-ray Spectroscopy, EDX, X-ray photoelectron spectroscopy, XPS, optical …
sputtering from titanium dioxide ceramic and chromium targets in Ar+ N2 atmosphere. Co-
doped samples of Ti (Cr) O2: N are investigated from the point of view of morphological,
crystallographic, optical, and electrical properties. Characterization techniques such as: X-
ray diffraction, XRD, scanning electron microscopy, SEM, atomic force microscopy, AFM,
Energy Dispersive X-ray Spectroscopy, EDX, X-ray photoelectron spectroscopy, XPS, optical …
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