after a magnetron-sputter process. A laser-irradiated post-annealing Raman scattering
analysis indirectly showed the possible formation of small size anatase TNO clusters within
the thin film matrix Although the TNO thin films were not crystallized, oxygen vacancies were
created by adding H 2 into the sputter gas during the deposition process. This improved the
conductivity and carrier concentration of the thin films. As the ratio of H 2 in sputter gas is f (H …