Optical detection for scanning microdeformation microscopy
B Cretin, P Vairac - Applied physics letters, 1997 - pubs.aip.org
Scanning microdeformation microscopy is a kind of ac contact force microscopy sensitive to
the variations of the local elastic constants of the investigated material. In this letter a new
optical interferometer designed for detecting the small displacement of the cantilever is
reported. The setup is described and some applications of the laser probe to scanning
microdeformation microscopy are demonstrated.© 1997 American Institute of Physics.
S0003-6951 (97) 00241-6 Different microscopes based on ac force have been developed …
the variations of the local elastic constants of the investigated material. In this letter a new
optical interferometer designed for detecting the small displacement of the cantilever is
reported. The setup is described and some applications of the laser probe to scanning
microdeformation microscopy are demonstrated.© 1997 American Institute of Physics.
S0003-6951 (97) 00241-6 Different microscopes based on ac force have been developed …
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