a silicon photodetector, is a challenging task of interest in many applications. Among the
available nanofabrication techniques to realize plasmonic nanostructures, Focused Ion
Beam (FIB) is surely the most promising, even if it is characterized by certain limitations,
such as ion implantation in the substrate. In this work, we demonstrate the direct integration
of plasmonic nanostructures directly on an active Si-photodetector by patterning a silver film …