Oxyfuel process is a promising technique for carbon capture and storage, and a new application of perovskite-type oxide is as oxygen carrier for CO2 capture in oxy-fuel combustion system. This study proposed a novelty process and an optimization study on the synthesis of the BaCoO3−δ perovskite powders using microwave-assisted EDTA method. OA16 (45) orthogonal experiments were employed to optimize the process parameters such as precursor pH, microwave time, microwave power and calcination temperature. The oxygen production performance of synthesized powders were investigated in a fixed-bed reactor system. It was found that the order of significant factors for oxygen production performance of synthesized perovskite samples is microwave radiation time > pH value of precursor solution > calcination temperature > microwave power. Based on the results of the range analysis, the best oxygen production performance of BaCoO3−δ was found at pH value of precursor solution was 8, microwave radiation time was 30 min, microwave power was 700 W and calcination temperature was 600 °C. Finally, the optimized sample was selected as candidate for multiple oxygen adsorption/desorption cycles tests. Results demonstrate that the prepared perovskites via optimized microwave-assisted EDTA process can be used as a potential oxygen carrier for oxyfuel combustion application.