Origin and perspectives of the 1.54 μm luminescence from ion-beam-synthesized precipitates in Si
C Spinella, S Coffa, C Bongiorno, S Pannitteri… - Applied Physics …, 2000 - pubs.aip.org
The structural and optical properties of β-FeSi 2 precipitates in Si have been analyzed. Float
zone Si samples were implanted at 250° C with 350 keV Fe ions to fluences in the range 1–
5× 10 15/cm 2 and annealed in vacuum at 800° C for times up to 24 h. Detailed
morphological analyses of these samples, using transmission electron microscopy, reveal
the presence of (i) a band of small (with a diameter< 30 nm) highly strained β-FeSi 2
precipitates centered at a depth of∼ 150 nm,(ii) a band of large (> 100 nm diameter) fully …
zone Si samples were implanted at 250° C with 350 keV Fe ions to fluences in the range 1–
5× 10 15/cm 2 and annealed in vacuum at 800° C for times up to 24 h. Detailed
morphological analyses of these samples, using transmission electron microscopy, reveal
the presence of (i) a band of small (with a diameter< 30 nm) highly strained β-FeSi 2
precipitates centered at a depth of∼ 150 nm,(ii) a band of large (> 100 nm diameter) fully …
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