Patterning a nanowell sensor biochip for specific and rapid detection of bacteria
This paper presents the fabrication process of a SEPTIC (SEnsing of Phage-Triggered Ion
Cascades) chip, consisting of two Ti contact pads and a 150nm wide Ti nanowell device on
LiNbO3 substrate. The patterning was fulfilled by combining electron beam lithography,
contact photolithography and reactive ion etching. When connected to an external
preamplifier and spectrum analyzer, the nanowell can probe nano-scale electric field
fluctuations. The use of this chip as nano-scale electric field probe was demonstrated by …
Cascades) chip, consisting of two Ti contact pads and a 150nm wide Ti nanowell device on
LiNbO3 substrate. The patterning was fulfilled by combining electron beam lithography,
contact photolithography and reactive ion etching. When connected to an external
preamplifier and spectrum analyzer, the nanowell can probe nano-scale electric field
fluctuations. The use of this chip as nano-scale electric field probe was demonstrated by …
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