Precision transfer printing of ultra-thin AlInGaN micron-size light-emitting diodes
2013 IEEE Photonics Conference, 2013•ieeexplore.ieee.org
… Abstract: We report the fabrication of a mechanically-flexible 16x16 array of thin-film,
micron-size LEDs emitting at 480 nm. Devices were transfer-printed onto a mechanically-flexible
ITO backplane using a modified, high-precision (placement accuracy ±25 nm) assembly
system. … In this context, we report here the demonstration of the pick-and-place transfer
printing of an AlInGaN LED array. The process was realized using a commercial nano-patterning
system (Nanoink Inc. NLP2000) converted into a computer-controlled …
micron-size LEDs emitting at 480 nm. Devices were transfer-printed onto a mechanically-flexible
ITO backplane using a modified, high-precision (placement accuracy ±25 nm) assembly
system. … In this context, we report here the demonstration of the pick-and-place transfer
printing of an AlInGaN LED array. The process was realized using a commercial nano-patterning
system (Nanoink Inc. NLP2000) converted into a computer-controlled …
We report the fabrication of a mechanically-flexible 16×16 array of thin-film, micron-size LEDs emitting at 480 nm. Devices were transfer-printed onto a mechanically-flexible ITO backplane using a modified, high-precision (placement accuracy ±25 nm) assembly system.
ieeexplore.ieee.org