Preparation and characterization of metallorganic chemical vapour deposited LixMoyOz using a single source solid precursor
Ionics, 2005•Springer
Thin films of Li x Mo y O z have been deposited on glass substrate in a one step chemical
vapour deposition using a single source solid precursor. The films were characterized using
Rutherford Backscattering Spectroscopy (RBS), X-Ray Diffractometry, Scanning Electron
Microscopy (SEM), Impedance Spectroscopy (IS), van der Pauw conductivity measurement
and Ultraviolet-Visible Spectroscopy. Results of the characterization showed that the films
are dendritic, polycrystalline and semiconducting with an optical transition energy of 3.0 eV …
vapour deposition using a single source solid precursor. The films were characterized using
Rutherford Backscattering Spectroscopy (RBS), X-Ray Diffractometry, Scanning Electron
Microscopy (SEM), Impedance Spectroscopy (IS), van der Pauw conductivity measurement
and Ultraviolet-Visible Spectroscopy. Results of the characterization showed that the films
are dendritic, polycrystalline and semiconducting with an optical transition energy of 3.0 eV …
Abstract
Thin films of LixMoyOz have been deposited on glass substrate in a one step chemical vapour deposition using a single source solid precursor. The films were characterized using Rutherford Backscattering Spectroscopy (RBS), X-Ray Diffractometry, Scanning Electron Microscopy (SEM), Impedance Spectroscopy (IS), van der Pauw conductivity measurement and Ultraviolet-Visible Spectroscopy. Results of the characterization showed that the films are dendritic, polycrystalline and semiconducting with an optical transition energy of 3.0 eV. IS characterization gave a semicircle in the complex impedance plot. The conductivity vs. temperature plot showed a transition at 450 °C and also a hysteresis. Analysis showed the film to be mixture of phases.
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