We demonstrate the preparation of molybdenum disulfide (MoS 2) nanopetals by RF magnetron sputtering and electron-beam irradiation (EBI). To investigate the structure and the surface morphology of MoS 2 films, atomic force microscopy (AFM), Raman spectroscopy, and scanning electron microscopy (SEM) were carried out. AFM results reveal that the surface roughness of MoS 2 increases with increase in deposition. After EBI process, the surface roughness decreases except for MoS 2 deposited for 5 min. In addition, EBI process increases the crystallinity of MoS 2 films, which is confirmed by Raman spectroscopy. The increase of crystallinity and the change of surface morphology are induced by inelastic scattering, which is the interaction between incident electrons and target material. SEM images display nanopetal structure of EBI-treated MoS 2 and we expect EBI-treated MoS 2 to be a potential candidate for applications such as gas sensors and hydrogen evolution reactions due to its vertically exposed edge sites.