The room temperature ozone sensing properties of polycrystalline undoped zinc oxide (ZnO)
thin films have been investigated. ZnO thin films have been produced by the dc and rf
magnetron sputtering technique as well as with spray pyrolysis with a variety of parameters.
The as-grown films were brought to a high conducting state through a reversible
photoreduction process by UV light exposure and were subsequently exposed to ozone
resulting in a strong resistivity increase caused by re-oxidation. The magnitude of the effect …