materials grown by molecular beam epitaxy (MBE) technique, is studied in this paper. The
investigations were performed on the structures containing (Al) GaAs or InGaAs layers. The
geometry, morphology as well as the optical properties of defects were studied by different
experimental methods, like spatially resolved photoluminescence (SRPL), scanning electron
microscopy (SEM) and cathodoluminescence (CL). The conclusions are drawn as to the …