epitaxial 001 Ba0. 6Sr0. 4TiO3 BST 60/40 and Pb0. 5Zr0. 5O3 PZT 50/50 thin films on 001
LaAlO3, 0.29 LaAlO3: 0.35 (Sr2TaAlO6) LSAT, MgO, Si, and SrTiO3 substrates as a function
of film thickness by taking into account the formation of misfit dislocations at the growth
temperature. The role of internal stress is discussed in detail with respect to epitaxy-induced
misfit and thermal stresses arising from the difference between the thermal expansion …