In this work, a setup for quantitative scanning capacitance spectroscopy is introduced, where
an ultrahigh precision, calibrated capacitance bridge is used together with a commercially
available atomic force microscope (AFM). We show that capacitance data measured with
this setup are of comparable quality as data obtained on macroscopic metal oxide
semiconductor capacitors. In addition, our setup is sensitive enough to resolve the energy
distribution of interface traps with the spatial resolution of an AFM. This is an advantage …

reposiTUm: Quantitative Scanning Capacitance Spectroscopy … Quantitative Scanning
Capacitance Spectroscopy … Infineon Workshop on Scanning Probe Microscopy and
Related Techniques …