double clamped radio frequency (RF) micro-electro-mechanical system (MEMS) capacitive
shunt switches in coplanar configuration. The key element of the exploited process is the
MicroChem SU-8 2002 negative photoresist. The polymeric material is widely used in MEMS
device processes because of its excellent thermal and chemical stability. In this paper, SU-8
polymer has been utilized in a double way to get suspended structures as double clamped …