Ratio-metric readout technique for MEMS gyroscopes with force feedback
2014 IEEE/ION Position, Location and Navigation Symposium-PLANS 2014, 2014•ieeexplore.ieee.org
This paper presents a ratio-metric readout technique for force-feedback gyroscopes that
achieves a precise scale factor. The drive mode self-oscillation loop is modified to
continuously estimate the scale factor to track and reject changes of the drive mode velocity
and proof mass voltage. Experiments demonstrate a twenty-fold reduction of scale factor
variations and the suppression of the turn-on transient. The device achieves an angle
random walk of 5.3 mdeg/rt-s and a bias stability of 3 deg/hr.
achieves a precise scale factor. The drive mode self-oscillation loop is modified to
continuously estimate the scale factor to track and reject changes of the drive mode velocity
and proof mass voltage. Experiments demonstrate a twenty-fold reduction of scale factor
variations and the suppression of the turn-on transient. The device achieves an angle
random walk of 5.3 mdeg/rt-s and a bias stability of 3 deg/hr.
This paper presents a ratio-metric readout technique for force-feedback gyroscopes that achieves a precise scale factor. The drive mode self-oscillation loop is modified to continuously estimate the scale factor to track and reject changes of the drive mode velocity and proof mass voltage. Experiments demonstrate a twenty-fold reduction of scale factor variations and the suppression of the turn-on transient. The device achieves an angle random walk of 5.3 mdeg/rt-s and a bias stability of 3 deg/hr.
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