Reduced-order modeling of weakly nonlinear MEMS devices with Taylor-series expansion and Arnoldi approach

J Chen, SM Kang, J Zou, C Liu… - Journal of …, 2004 - ieeexplore.ieee.org
J Chen, SM Kang, J Zou, C Liu, JE Schutt-Ainé
Journal of Microelectromechanical systems, 2004ieeexplore.ieee.org
In this paper, we present a new technique by combining the Taylor series expansion with the
Arnoldi method to automatically develop reduced-order models for coupled energy domain
nonlinear microelectromechanical devices. An electrostatically actuated fixed-fixed beam
structure with squeeze-film damping effect is examined to illustrate the model-order
reduction method. Simulation results show that the reduced-order nonlinear models can
accurately capture the device dynamic behavior over a much larger range of device …
In this paper, we present a new technique by combining the Taylor series expansion with the Arnoldi method to automatically develop reduced-order models for coupled energy domain nonlinear microelectromechanical devices. An electrostatically actuated fixed-fixed beam structure with squeeze-film damping effect is examined to illustrate the model-order reduction method. Simulation results show that the reduced-order nonlinear models can accurately capture the device dynamic behavior over a much larger range of device deformation than the conventional linearized model. Compared with the fully meshed finite-difference method, the model reduction method provides accurate models using orders of magnitude less computation. The reduced MEMS device models are represented by a small number of differential and algebraic equations and thus can be conveniently inserted into a circuit simulator for fast and efficient system-level simulation.
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