Remote capacitive sensing in two-dimensional quantum-dot arrays

J Duan, MA Fogarty, J Williams, L Hutin, M Vinet… - Nano Letters, 2020 - ACS Publications
Nano Letters, 2020ACS Publications
We investigate gate-induced quantum dots in silicon nanowire field-effect transistors
fabricated using a foundry-compatible fully depleted silicon-on-insulator (FD-SOI) process. A
series of split gates wrapped over the silicon nanowire naturally produces a 2× n bilinear
array of quantum dots along a single nanowire. We begin by studying the capacitive
coupling of quantum dots within such a 2× 2 array and then show how such couplings can
be extended across two parallel silicon nanowires coupled together by shared, electrically …
We investigate gate-induced quantum dots in silicon nanowire field-effect transistors fabricated using a foundry-compatible fully depleted silicon-on-insulator (FD-SOI) process. A series of split gates wrapped over the silicon nanowire naturally produces a 2 × n bilinear array of quantum dots along a single nanowire. We begin by studying the capacitive coupling of quantum dots within such a 2 × 2 array and then show how such couplings can be extended across two parallel silicon nanowires coupled together by shared, electrically isolated, “floating” electrodes. With one quantum dot operating as a single-electron-box sensor, the floating gate serves to enhance the charge sensitivity range, enabling it to detect charge state transitions in a separate silicon nanowire. By comparing measurements from multiple devices, we illustrate the impact of the floating gate by quantifying both the charge sensitivity decay as a function of dot-sensor separation and configuration within the dual-nanowire structure.
ACS Publications
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