Sampling-based release control of multiple lots in time constraint tunnels

A Lima, V Borodin, S Dauzère-Pérès, P Vialletelle - Computers in Industry, 2019 - Elsevier
Semiconductor wafer fabrication probably includes the most complex and constrained
manufacturing processes due to its intricate and time-varying environment. This paper
focuses on time constraint tunnels (TCTs), which can have a very high impact on the yield
and reliability of final products. More precisely, the original problem faced by managers of
controlling the release of multiple lots in a TCT is addressed in the context of a wafer facility
operating in a High-Mix Medium-Volume manufacturing environment. To support the …
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