… These applications of low force actuation/sensing range from determination of the mechanical
properties of nano-materials, biological structures and organic molecules, eg thin films [1], …

… shown by a spring. (c) schematically shows a soft sample interacting with the force probe.
Here, x p … (b) A moving beam in the stiffness-adjustment structure as the probe moves by x. (c) …

… This actuation/sensing arrangement makes it difficult to … In present work, the mechanical
structure of the cantilever is … mechatronic systems, high-speed scanning probe microscopy and …

… The active probes are aimed for scanning tunneling microscopy (… This is addressed by
having a stiffer probe structure and … The current probe is 329 tical spring constant of 36.3 denter, …

… Scanning Probe Array Memory), waarbij we ernaar streven een prototype te ontwerpen van
een dataopslagmedium dat gebaseerd is op het probe … to systems with structures between …

An actuator-integrated MEMS needle probe is improved to measure … structures such as
microholes and trenches. A newly developed surface scanning method, called ¿swing probing¿, …

… systems requires to include mechanics, architecture, … , optical devices, scanning probe
microscopy, and nanolithography… One of the types of SMA actuators can be the SMA spring, which …

… As shown before in Table 2.3, the leafspring thickness of the folded flexure needed to be
19 ñm. Our fabrication process only allowed structures with a thickness up to 10ñm to be …

… structure, the force vs. deflection (F − d) curve was recorded to obtain the spring constant
of the system… The chip has eight contact pads for electrical actuation/sensing. The chip is …

… , including inside scanning probe microscopes (SPM), high-… amplification structure for the
proposed rotational scanner. The … A linear spring was added to the model between the two …