… compatible with the invisible SiO x N y hardmask. Lithographic process windows, CDU,
and … triple patterning memorized into the SiO x N y hardmask after which patterns are then …

… Here, we show that ultra-small-dimension hard masks can be used to develop large … patterns
were solvent-processed, and metal ions were included into chosen domains via a selective …

… inorganic hardmasks and how they can be used in EUV patterning stacks. The hardmask …
resist scumming while the bulk etch selectivity is targeted to tune hardmask open selectivity. …

… hard masks for reactive-ion etching. Here, we demonstrate the applicability of our method to
pattern sub-… exceptionally high spatial patterning resolution with excellent etching selectivity. …

… block selectivity and directionality of the etching protocol and reproducibility. Hard masks are
… Different hard masks such as dielectrics (SiO 2 , Al 2 O 3 , and Si 3 N 4 ), metal oxides, and …

… patterning is performed by etching trenches and vias in porous … Metallic hard masks can help
thanks to their high selectivity … key issues related to the patterning of narrow porous SiOCH …

… a good hardmask include the ability to transfer patterns into … goal, the hardmask film must
possess superior etch selectivity … show that etch selectivity of a - C : H hardmask (to underlayers…

… patterning on deposited hardmasks of various types such as silicon oxides and metal hardmasks.
It … if the etch selectivity between resist/hardmask and hardmask/OPL layer is increased. …

… provided by the inorganic hardmasks comes at the expense of … the method of direct patterning
of hard masks (DPHM) utilizing … an etch selectivity of 22 for the deposited Pt hardmask as …

… precursors as hardmask materials to pattern high-… hardmasks for pattern transfer with
each exhibiting similar efficacy. Highly selective dry etch procedures were employed to pattern …