validation work undertaken on Intel’s 22nm Tri-Gate technology. Extensive measurements of
transistor self-heat at various locations in the Tri-Gate architecture stack were matched very well
to 3DFEM thermal simulations. Clear qualitative matching was demonstrated between
3DFEM-calibrated circuit simulations and physical measurements of the local temperature rise.
The … It is very important to emphasize that the overall selfheating of Intel’s 22nm Tri-Gate …