Sensitivity and power modeling of CMOS MEMS single axis convective accelerometers
In this paper, we present 3D finite element modeling and simulation of a CMOS MEMS
single axis convective accelerometer. We describe the sensor architecture and present a
sensor geometry model to be used in 3D FEM simulations. Differences between 3D and
previously published 2D simulations are discussed. This work investigates 3D effects which
give the opportunity to better predict not only sensor sensitivity but also power dissipation.
Experimental sensitivity values and 3D FEM ones are compared for two different sensor …
single axis convective accelerometer. We describe the sensor architecture and present a
sensor geometry model to be used in 3D FEM simulations. Differences between 3D and
previously published 2D simulations are discussed. This work investigates 3D effects which
give the opportunity to better predict not only sensor sensitivity but also power dissipation.
Experimental sensitivity values and 3D FEM ones are compared for two different sensor …
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