A micro-resonant electrometer with the scheme of sensitivity manipulation is proposed to
realize the high resolution and large dynamic range based on a mechanical resonator and
actuator. As the key sensing element, the double-ended tuning fork resonator has a quality
factor close to 10 000 and low motional resistance below 0.5 MΩ. Electrical and mechanical
nonlinear features of the resonator are investigated. The charge sensing functionality based
on the axial strain modulation scheme is calibrated with a high resolution of 2.6 fC under …