Sequential position readout from a microfabricated array of eight cantilever-type sensors
(silicon technology) is demonstrated. In comparison with single sensors we find that
mechanical disturbances from noise, such as from vibrations, turbulent gas flow, or abrupt
pressure changes, can be effectively removed in array sensors by recording difference
signals with respect to reference cantilevers. We demonstrate that chemically specific
responses can be extracted in a noisy environment using a sensor to detect specific …