… of two sheets of fixed charges, one at the interface between the silicon wafer and the oxide,
and the other at the bond, we were able to evaluate each of them separately. The density of …

… randomly distributed over the wafer surface for monocrystalline silicon wafers with a (100) …
planar, silicon wafer can be reduced from 35 to 12% [4]. After texturing, the wafers are rinsed …

… The generally most successful approach for silicon wafers … cleaning technology for
premetallized silicon wafers from its … This section chronologically reviews references on silicon …

… of silicon wafers, impacts of wafer size progression on applications of grinding in silicon
wafer manufacturing, and interrelationships between grinding and two other silicon machining …

… When a typical 300 μm thick silicon wafer is illuminated by … , for a 1 Ω cm p-type wafer. The
relationship is logarithmic, and it … time to travel across the silicon wafer and they reach the pn …

… of silicon wafers. In this paper, the uniqueness and the special requirements of the silicon
wafer … Then some experimental results on the fine grinding of silicon wafers are presented and …

… species, which was accomplished primarily by wafer immersion in chemical baths. Most
cleaning was performed before insertion of wafers into furnaces where diffusion of impurities …

… silicon wafers in detail. Microelectromechanical systems (MEMS) manufacturing sets special
requirements for silicon wafers… Wafers are cut from the ingot, shaped, polished, and cleaned …

… of silicon wafers. The demand for silicon wafers with better quality and lower price presents
tremendous challenges for the grinding wheels used in the silicon wafer industry. The …

… on Si wafers with different surface roughness were investigated. Variable roughness of the
Si wafer … The adherence and subsequent viability of the cells on the wafer were examined by …