Silicon-integrated hybrid-cavity 850-nm VCSELs by adhesive bonding: Impact of bonding interface thickness on laser performance

EP Haglund, S Kumari, E Haglund… - IEEE Journal of …, 2016 - ieeexplore.ieee.org
IEEE Journal of Selected Topics in Quantum Electronics, 2016ieeexplore.ieee.org
The impact of bonding interface thickness on the performance of 850-nm silicon-integrated
hybrid-cavity vertical-cavity surface-emitting lasers (HC-VCSELs) is investigated. The HC-
VCSEL is constructed by attaching a III-V “half-VCSEL” to a dielectric distributed Bragg
reflector on a Si substrate using ultrathin divinylsiloxane-bis-benzocyclobutene (DVS-BCB)
adhesive bonding. The thickness of the bonding interface, defined by the DVS-BCB layer
together with a thin SiO 2 layer on the “half-VCSEL,” can be used to tailor the performance …
The impact of bonding interface thickness on the performance of 850-nm silicon-integrated hybrid-cavity vertical-cavity surface-emitting lasers (HC-VCSELs) is investigated. The HC-VCSEL is constructed by attaching a III-V “half-VCSEL” to a dielectric distributed Bragg reflector on a Si substrate using ultrathin divinylsiloxane-bis-benzocyclobutene (DVS-BCB) adhesive bonding. The thickness of the bonding interface, defined by the DVS-BCB layer together with a thin SiO 2 layer on the “half-VCSEL,” can be used to tailor the performance, for e.g., maximum output power or modulation speed at a certain temperature, or temperature-stable performance. Here, we demonstrate an optical output power of 2.3 and 0.9 mW, a modulation bandwidth of 10.0 and 6.4 GHz, and error-free data transmission up to 25 and 10 Gb/s at an ambient temperature of 25 and 85 °C, respectively. The thermal impedance is found to be unaffected by the bonding interface thickness.
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