We demonstrate the design, fabrication, and characterization of single-mode low-loss waveguides for mid-infrared (MIR) wavelengths. Planar waveguide structures were fabricated from multilayer thin films of arsenic-based chalcogenide glasses followed by the creation of channel waveguides by using the photodarkening effect. Propagation losses as low as 0.5?dB∕cm were measured for a quantum cascade laser end-fire coupled into the waveguides. This is a first step toward the design and fabrication of integrated optical components for MIR applications.