Solution processed aluminum-doped ZnO thin films for transparent heater applications

B Tönbül, HA Can, T Öztürk, H Akyıldız - Materials Science in …, 2021 - Elsevier
Materials Science in Semiconductor Processing, 2021Elsevier
A study was carried out to tailor the properties of ultrasonic spray pyrolysis deposited Al-
doped ZnO (AZO) thin films suitable for transparent heater applications. For this purpose, the
influences of solvent/precursor type and molarity, Al-doping concentration, nozzle to
substrate distance, solution flow rate, carrier gas flow, substrate temperature, and post-
deposition annealing on the microstructure, electrical, optical properties, and
heating/deicing behaviors of the films were investigated. The optimized heaters were …
Abstract
A study was carried out to tailor the properties of ultrasonic spray pyrolysis deposited Al-doped ZnO (AZO) thin films suitable for transparent heater applications. For this purpose, the influences of solvent/precursor type and molarity, Al-doping concentration, nozzle to substrate distance, solution flow rate, carrier gas flow, substrate temperature, and post-deposition annealing on the microstructure, electrical, optical properties, and heating/deicing behaviors of the films were investigated. The optimized heaters were produced on 50 × 75 mm2 glass substrates at 400 °C with 750 nm thickness and annealed under forming gas for 90 min. This sample revealed a good sheet resistance value of 38.7 Ω/□ and 83% transmittance in the visible region. Heating/deicing tests showed that the maximum achievable surface temperature was 76 °C under an applied potential of 12 V and all ice/water can be removed completely within 250 s. In addition, the AZO heater exhibited a very high thermal resistance value (409 °C cm2/Watts) with stable and reversible heating behavior.
Elsevier
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