Structural, optical and XPS study of thermal evaporated In2O3 thin films
The nanostructured In 2 O 3 thin films were deposited on Si n-type (1 0 0) substrates by
reactive thermal evaporation. The structural, morphological, and oxidation states of the films
were investigated using x-ray diffraction, scanning electron microscopy, atomic force
microscopy, and x-ray photoelectron spectroscopy. The optical properties of the films were
analyzed by UV–vis spectroscopy, Raman spectroscopy, and photoluminescence
spectroscopy. The deposited films showed c-In 2 O 3 crystalline nanostructures with a …
reactive thermal evaporation. The structural, morphological, and oxidation states of the films
were investigated using x-ray diffraction, scanning electron microscopy, atomic force
microscopy, and x-ray photoelectron spectroscopy. The optical properties of the films were
analyzed by UV–vis spectroscopy, Raman spectroscopy, and photoluminescence
spectroscopy. The deposited films showed c-In 2 O 3 crystalline nanostructures with a …
Structural, optical and XPS study of thermal evaporated In2O3 thin films
I Neelakanta Reddy, C Venkata Reddy… - Materials Research …, 2017 - ui.adsabs.harvard.edu
The nanostructured In 2 O 3 thin films were deposited on Si n-type (1 0 0) substrates by
reactive thermal evaporation. The structural, morphological, and oxidation states of the films
were investigated using x-ray diffraction, scanning electron microscopy, atomic force
microscopy, and x-ray photoelectron spectroscopy. The optical properties of the films were
analyzed by UV-vis spectroscopy, Raman spectroscopy, and photoluminescence
spectroscopy. The deposited films showed c-In 2 O 3 crystalline nanostructures with a …
reactive thermal evaporation. The structural, morphological, and oxidation states of the films
were investigated using x-ray diffraction, scanning electron microscopy, atomic force
microscopy, and x-ray photoelectron spectroscopy. The optical properties of the films were
analyzed by UV-vis spectroscopy, Raman spectroscopy, and photoluminescence
spectroscopy. The deposited films showed c-In 2 O 3 crystalline nanostructures with a …
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