1550 nm in a PN-diode-integrated silicon microring resonator. The photocurrent is primarily
generated by the defect-state absorption introduced by the boron and phosphorous ion
implantation during the PN diode formation. The responsivity is enhanced by both the cavity
effect and the avalanche multiplication. We measure a responsivity of∼ 72.8 mA/W upon 8 V
at cavity resonances in avalanche mode, corresponding to a gain of∼ 72 relative to the …