… III, we address factors that affect the design and fabrication of … mandating the use of
sublithographic techniques for accurate … above a particular threshold V t is applied to a phase …

… classify phase-change memory devices into phase-change … aperture of 1.85 has been
successfully fabricated [Citation101]. … engineering the PRAM cell to sublithographic sizes with the …

… above a particular threshold Vt is applied to a phase-change … assume that the sublithographic
size of the phase-change critical … In order to fabricate a phase-change memory cell that will …

… 17 have been fabricated. The term “doping” is used in the … is elemental segregation, in
particular Sb enrichment in the … Thus, by using sub-lithographic scale electrodes, such as carbon …

… Phase change memory gets its name from phase change … been development of sub-lithographic
techniques required … , which is easy and quick for fabrication (b) underlying substrates, …

… a particular threshold is applied to a phase-change material … used, with phasechange
nanoparticles fabricated by PMMA removal… that the sublithographic size of the phasechange …

… The phase-change memory cell based on Ti 0.4 Sb 2 Te 3 … , [217] where a sub-lithographic
hole formed in a dielectric … , the partial confined structure was fabricated and is a promising …

… contact (BEC)/GST interface to the sublithographic regime. The edge-contact-type cell was
first fabricated … organized in an array must have a means to select the individual memory cells …

… control of the sub-lithographic features achieved with the μTrench … In particular, large efforts
are being dedicated to the … steps employed in the cell fabrication, still providing far superior …

… to cost, product-level fabrication and high-level … cell where a sublithographic hole is
formed in an insulating material on top of the bottom electrode which is filled with phase-change …