Substrate dependant capacitive performance of spray pyrolysed titanium oxide (TiO2) thin films

BY Fugare, RS Ingole, RC Ambare… - AIP Conference …, 2016 - pubs.aip.org
Using 60 ml, 0.06 M aqueous solution of potassium titanium oxalate (pto), thin films of
titanium oxide were prepared by using well known spray pyrolysis technique. Depositions of
the films carried out at 723o K by maintain the spray rate 12 Cc/min. prepared thin films were
characterized structurally, morphologically and electrochemically. Sample shows tetragonal
crystal structure with rutile as prominent phase at very low deposition temperature. SEM
morphology shows porous, dense, nanorods and nanoplates like morphology. The …
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