Suspended waveguides have been widely applied to silicon-on-insulator structures
because they are easily fabricated with processing techniques similar to those of integrated
circuit design. However, it is difficult to fabricate such structures in lithium niobate, which is
also a very important material for optoelectronics. One main challenge is the difficulty of
etching lithium niobate. In this work, the authors show a method to fabricate suspended slab
waveguides in lithium niobate by combining ion implantation, focused ion beam milling, and …