Three new volatile cobalt amidinate compounds were prepared: Co(tBuNC(R)NEt)2, R = Me, Et and n-Bu. They were characterized by elemental analysis, 1H NMR, X-ray structure analysis, melting point, vapor pressure, vaporization rate, thermal stability and chemical reactivity. They were found to evaporate cleanly without decomposition. Two of them are liquids at room temperature, allowing for more convenient preparation, handling and purification by distillation. They are highly reactive compounds that have been found to be suitable precursors for vapor deposition of cobalt metal, cobalt nitride and cobalt oxide. A new synthetic method allows for the facile and inexpensive preparation of large quantities of these compounds.