development station. Recently, new instrumentation has been installed to extend its
metrology capability. A monochromatic beam can be produced over an energy range
spanning from 6 keV to 100 keV using two Bragg Si (111) flat‐crystal monochromators. It is
also possible to install a sagittal crystal (6 keV< E< 30 keV) to concentrate the beam
horizontally to 300 μm, therefore increasing the photon density by∼ 2 orders of magnitude …