frequency sputtering system was evaluated. Amorphous Ga 2 O 3 is cheaper and more
efficiently fabricated than crystalline Ga 2 O 3, and is studied in various fields such as
RRAM, photodetector, and flexible devices. In this study, amorphous Ga 2 O 3 was
deposited by radio frequency sputtering system and represented a transmittance of over
80% in the visible light region and a homogeneous and dense surface. The optical band …