The Effect of Sputtering Power on Amorphous Ga2O3 Deposited by RF Sputtering System

H Kim, S Park, K Kim, J Hong - Journal of the Korean Institute of …, 2023 - koreascience.kr
Journal of the Korean Institute of Electrical and Electronic Material …, 2023koreascience.kr
The effect of sputtering power on the amorphous Ga 2 O 3 thin film deposited using the radio
frequency sputtering system was evaluated. Amorphous Ga 2 O 3 is cheaper and more
efficiently fabricated than crystalline Ga 2 O 3, and is studied in various fields such as
RRAM, photodetector, and flexible devices. In this study, amorphous Ga 2 O 3 was
deposited by radio frequency sputtering system and represented a transmittance of over
80% in the visible light region and a homogeneous and dense surface. The optical band …
Abstract
The effect of sputtering power on the amorphous Ga 2 O 3 thin film deposited using the radio frequency sputtering system was evaluated. Amorphous Ga 2 O 3 is cheaper and more efficiently fabricated than crystalline Ga 2 O 3, and is studied in various fields such as RRAM, photodetector, and flexible devices. In this study, amorphous Ga 2 O 3 was deposited by radio frequency sputtering system and represented a transmittance of over 80% in the visible light region and a homogeneous and dense surface. The optical band gap energy decreased as the sputtering power increased owing to the quantum size effect. Thus, the specific band gap of amorphous Ga 2 O 3 can be obtained by adjusting the sputtering power, it indicates amorphous Ga 2 O 3 can be used in various fields.
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