The broadening of the energy distribution of atoms scattered by a solid surface under
molecular or cluster bombardment is due to some shuttle-type mutual collisions of the
molecular atoms after scattering from the surface. The results of the calculation satisfactorily
explain the experimental data on the broadening of the energy distribution for the scattering
of nitrogen atoms from graphite and gold surfaces under bombardment with molecular
nitrogen.

The broadening of energy spectra of atoms scattered by a metal surface under molecular ion
bombardment are calculated taking into account the molecular ions to suffer dissociative
neutralization on the initial part of their scattering trajectory. The results of the calculations
explain the experimental data for scattering of hydrogen atoms from aluminum, palladium
and palladium covered by potassium surfaces under bombardment with H2+.