The cross-plane thermoelectric properties of p-Ge/Si0. 5Ge0. 5 superlattices

L Ferre Llin, A Samarelli, S Cecchi, T Etzelstorfer… - Applied physics …, 2013 - pubs.aip.org
The electrical conductivity, Seebeck coefficients, and thermal conductivities of a range of p-
type Ge/Si 0.5 Ge 0.5 superlattices designed for thermoelectric generation and grown by low
energy plasma enhanced chemical vapor deposition have been measured using a range of
microfabricated test structures. For samples with barriers around 0.5 nm in thickness, the
measured Seebeck coefficients were comparable to bulk p-SiGe at similar doping levels
suggesting the holes see the material as a random bulk alloy rather than a superlattice. The …
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