type Ge/Si 0.5 Ge 0.5 superlattices designed for thermoelectric generation and grown by low
energy plasma enhanced chemical vapor deposition have been measured using a range of
microfabricated test structures. For samples with barriers around 0.5 nm in thickness, the
measured Seebeck coefficients were comparable to bulk p-SiGe at similar doping levels
suggesting the holes see the material as a random bulk alloy rather than a superlattice. The …