The field-dependence endurance model and its mutual effect in Hf-based ferroelectrics

YK Chang, PJ Liao, SH Yeong, YM Lin… - 2022 IEEE …, 2022 - ieeexplore.ieee.org
YK Chang, PJ Liao, SH Yeong, YM Lin, JH Lee, CT Lin, Z Yu, W Tsai, PC McIntyre
2022 IEEE International Reliability Physics Symposium (IRPS), 2022ieeexplore.ieee.org
A comprehensive study of electric field (E-field) dependent endurance on Hf-based
ferroelectric (FE) fatigue and breakdown mechanism is presented in this study. Under low E-
field, reducing E-field worsens FE fatigue and constrains endurance but with no SILC
increase as the result of the domain pinning. While under the high E-field stress, endurance
is dominated by the field accelerated breakdown due to the increase of oxygen vacancy
generation. By utilizing these distinct FE fatigue characteristics under different bias, the …
A comprehensive study of electric field (E-field) dependent endurance on Hf-based ferroelectric (FE) fatigue and breakdown mechanism is presented in this study. Under low E-field, reducing E-field worsens FE fatigue and constrains endurance but with no SILC increase as the result of the domain pinning. While under the high E-field stress, endurance is dominated by the field accelerated breakdown due to the increase of oxygen vacancy generation. By utilizing these distinct FE fatigue characteristics under different bias, the recoverable fatigue and prolonged cycle-to-breakdown is observed through a promising high frequency mixed-signal E-field operation.
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