(MEMS) Double-Ended Tuning-Fork (DETF) resonators that exhibit an intrinsic sub-350 ppm
thermal stability in the temperature range [5° C-85° C] are reported. A strategy for the
optimization of the design of MEMS resonators that exhibit high thermal stability and high
quality factor is also provided and a good agreement with experimental data is achieved.
The main advantage of the proposed strategy is that it does not require any experimental …