Thin-film Li-doped NiO for thermoelectric hydrogen gas sensor
M Matsumiya, F Qiu, W Shin, N Izu, N Murayama… - Thin Solid Films, 2002 - Elsevier
A hydrogen gas sensor using thermoelectric (TE) Li-doped NiO thin film with platinum
catalyst film on the half of its surface was fabricated and this thin-film sensor has strong
adhesion on the substrate. When this sensor is exposed to air mixed with the hydrogen gas,
catalytic reaction heats up the platinum-coated surface, and then TE voltage builds up along
the hot and cold region of the oxide film. The Li-doped NiO thin film was deposited by rf
sputtering method on three different substrates and followed by thermal annealing. The …
catalyst film on the half of its surface was fabricated and this thin-film sensor has strong
adhesion on the substrate. When this sensor is exposed to air mixed with the hydrogen gas,
catalytic reaction heats up the platinum-coated surface, and then TE voltage builds up along
the hot and cold region of the oxide film. The Li-doped NiO thin film was deposited by rf
sputtering method on three different substrates and followed by thermal annealing. The …
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