illuminated GaN/AlGaN pin photodiodes has been successfully developed. The diode
structure consists of a base n-type layer of AlGaN (~ 23% Al) followed by undoped and then
p-type GaN layers deposited by metal organic vapor phase epitaxy. Double-side polished
sapphire wafers serve as transparent substrates. Standard photolithographic, etching, and
metallization procedures were employed to fabricate the devices. The fully-processed …