UV-specific (320-365 nm) digital camera based on a 128× 128 focal plane array of GaN/AlGaN pin photodiodes

JD Brown, J Boney, J Matthews… - … Internet Journal of …, 2000 - cambridge.org
JD Brown, J Boney, J Matthews, P Srinivasan, JF Schetzina, T Nohava, W Yang…
Materials Research Society Internet Journal of Nitride Semiconductor …, 2000cambridge.org
An ultraviolet-specific (320-365 nm) digital camera based on a 128× 128 array of backside-
illuminated GaN/AlGaN pin photodiodes has been successfully developed. The diode
structure consists of a base n-type layer of AlGaN (~ 23% Al) followed by undoped and then
p-type GaN layers deposited by metal organic vapor phase epitaxy. Double-side polished
sapphire wafers serve as transparent substrates. Standard photolithographic, etching, and
metallization procedures were employed to fabricate the devices. The fully-processed …
An ultraviolet-specific (320-365 nm) digital camera based on a 128×128 array of backside-illuminated GaN/AlGaN p-i-n photodiodes has been successfully developed. The diode structure consists of a base n-type layer of AlGaN (~23% Al) followed by undoped and then p-type GaN layers deposited by metal organic vapor phase epitaxy. Double-side polished sapphire wafers serve as transparent substrates. Standard photolithographic, etching, and metallization procedures were employed to fabricate the devices. The fully-processed photodiode array was hybridized to a silicon readout integrated circuit (ROIC) using In bump bonds for electrical contact. The UV camera was operated at room temperature at frame rates ranging from 15 to 240 Hz. A variety of UV scenes were successfully recorded with this configuration.
Cambridge University Press
以上显示的是最相近的搜索结果。 查看全部搜索结果